JPS62103478U - - Google Patents
Info
- Publication number
- JPS62103478U JPS62103478U JP19598885U JP19598885U JPS62103478U JP S62103478 U JPS62103478 U JP S62103478U JP 19598885 U JP19598885 U JP 19598885U JP 19598885 U JP19598885 U JP 19598885U JP S62103478 U JPS62103478 U JP S62103478U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- main surface
- holding part
- holding
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004528 spin coating Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985195988U JPH0446858Y2 (en]) | 1985-12-19 | 1985-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985195988U JPH0446858Y2 (en]) | 1985-12-19 | 1985-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62103478U true JPS62103478U (en]) | 1987-07-01 |
| JPH0446858Y2 JPH0446858Y2 (en]) | 1992-11-05 |
Family
ID=31154386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985195988U Expired JPH0446858Y2 (en]) | 1985-12-19 | 1985-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0446858Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102135U (en]) * | 1980-12-12 | 1982-06-23 | ||
| JPS59104650A (ja) * | 1982-12-07 | 1984-06-16 | Toshiba Corp | レジスト膜形成装置 |
-
1985
- 1985-12-19 JP JP1985195988U patent/JPH0446858Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57102135U (en]) * | 1980-12-12 | 1982-06-23 | ||
| JPS59104650A (ja) * | 1982-12-07 | 1984-06-16 | Toshiba Corp | レジスト膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0446858Y2 (en]) | 1992-11-05 |